These ultra-clean carts are designed specifically for wafer boat transport. Rod shelf models feature 0.25" (6mm)-diameter rods welded on 2" (51mm) centers. Perforated shelf models feature 0.5" (13mm)-diameter cut-outs. Both designs optimize air flow-through and minimize the chance of particle accumulation.
- Certified Class 1 compatible by an independent test laboratory.
- UltraClean™ electropolished type 304 stainless steel surfaces wipe down clean, without snagging wipers or sloughing particles.
- Angled shelves position wafer boats securely against retaining rails.
- Spring-loaded locking polyurethane casters ensure smooth rolling to protect delicate wafers during transit.
- Standard sizes available for all lot box sizes, including 300mm wafers.
Custom semiconductor carts are available.