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Semiconductor Carts

These ultra-clean carts are designed specifically for wafer boat transport. Rod shelf models feature 0.25" (6mm)-diameter rods welded on 2" (51mm) centers. Perforated shelf models feature 0.5" (13mm)-diameter cut-outs. Both designs optimize air flow-through and minimize the chance of particle accumulation.

  • Certified Class 1 compatible by an independent test laboratory.
  • UltraClean™ electropolished type 304 stainless steel surfaces wipe down clean, without snagging wipers or sloughing particles.
  • Angled shelves position wafer boats securely against retaining rails.
  • Spring-loaded locking polyurethane casters ensure smooth rolling to protect delicate wafers during transit.
  • Standard sizes available for all lot box sizes, including 300mm wafers.
Palbam Cleanroom Carts Catalog

Custom semiconductor carts are available.

Click here to view the full catalog.

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