Semiconductor Carts

These ultra-clean carts are designed specifically for wafer boat transport. Rod shelf models feature 0.25" (6mm)-diameter rods welded on 2" (51mm) centers. Perforated shelf models feature 0.5" (13mm)-diameter cut-outs. Both designs optimize air flow-through and minimize the chance of particle accumulation.

  • Certified Class 1 compatible by an independent test laboratory.
  • UltraClean™ electropolished type 304 stainless steel surfaces wipe down clean, without snagging wipers or sloughing particles.
  • Angled shelves position wafer boats securely against retaining rails.
  • Spring-loaded locking polyurethane casters ensure smooth rolling to protect delicate wafers during transit.
  • Standard sizes available for all lot box sizes, including 300mm wafers.
Palbam Cleanroom Carts Catalog

Custom Semiconductor Carts are Available.

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View as Grid List

4 Items

Set Descending Direction
  1. Palbam Class 6-PCC Wafer Cassette Transport Cart with 6 Nests for 200mm Wafers, 30" x 55" x 43.5"
    Request a Quote
  2. Palbam Class 4-PCC Wafer Cassette Transport Cart with 4 Nests for 200mm Wafers, 30" x 40" x 43"
    Request a Quote
  3. Palbam Class 6-PWC WIP Wafer Transport Cart with 6 Nests for 200mm Wafers, 19" x 35" x 48"
    Request a Quote
  4. Palbam Class 4-PWC WIP Wafer Transport Cart with 4 Nests for 200mm Wafers, 16" x 35" x 37"
    Request a Quote
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